Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

Ching-Liang Dai, Po-Wei Lu, Chienliu Chang, Cheng-Yang Liu. Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip. Sensors, 9(12):10158-10170, 2009. [doi]

Abstract

Abstract is missing.