Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

Ching-Liang Dai, Po-Wei Lu, Chyan-Chyi Wu, Chienliu Chang. Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process. Sensors, 9(11):8748-8760, 2009. [doi]

Authors

Ching-Liang Dai

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Po-Wei Lu

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Chyan-Chyi Wu

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Chienliu Chang

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