Ching-Liang Dai, Po-Wei Lu, Chyan-Chyi Wu, Chienliu Chang. Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process. Sensors, 9(11):8748-8760, 2009. [doi]
@article{DaiLWC09, title = {Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process}, author = {Ching-Liang Dai and Po-Wei Lu and Chyan-Chyi Wu and Chienliu Chang}, year = {2009}, doi = {10.3390/s91108748}, url = {http://dx.doi.org/10.3390/s91108748}, researchr = {https://researchr.org/publication/DaiLWC09}, cites = {0}, citedby = {0}, journal = {Sensors}, volume = {9}, number = {11}, pages = {8748-8760}, }