Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

Ching-Liang Dai, Po-Wei Lu, Chyan-Chyi Wu, Chienliu Chang. Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process. Sensors, 9(11):8748-8760, 2009. [doi]

@article{DaiLWC09,
  title = {Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process},
  author = {Ching-Liang Dai and Po-Wei Lu and Chyan-Chyi Wu and Chienliu Chang},
  year = {2009},
  doi = {10.3390/s91108748},
  url = {http://dx.doi.org/10.3390/s91108748},
  researchr = {https://researchr.org/publication/DaiLWC09},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {9},
  number = {11},
  pages = {8748-8760},
}