A micro scale oxidation film generated by gas discharge plasma at atmosphere

Wei Dai, Jianjun Li, Zhizhen Zheng, Qiwen Huang. A micro scale oxidation film generated by gas discharge plasma at atmosphere. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 143-144, IEEE, 2015. [doi]

Abstract

Abstract is missing.