Yichuan Dai, Li Wen, Jie Liu, Hai Wang. Simulation and experiment of inverted pyramid DBD micro-plasma devices array for maskless nanoscale etching. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 460-463, IEEE, 2016. [doi]
Abstract is missing.