Huang Dan, Yan Juanwei, Qiao Fei. Modeling with hierarchical Petri net of semiconductor manufacturing system. In 8th International Conference on Control, Automation, Robotics and Vision, ICARCV 2004, Kunming, China, 6-9 December 2004, Proceedings. pages 2217-2222, IEEE, 2004. [doi]
Abstract is missing.