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Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application

Minh Phung Dang, Hieu Giang Le, Thu Thi Dang Phan, Ngoc Le Chau, Thanh-Phong Dao. Design and Optimization for a New XYZ Micropositioner with Embedded Displacement Sensor for Biomaterial Sample Probing Application. Sensors, 22(21):8204, 2022. [doi]

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