Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass

Jean Marie Darmanin, Ivan Grech, Joseph Micallef, Edward Gatt, Owen Casha, Ansel Briffa. Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass. In Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013. pages 2100-2105, IEEE, 2013. [doi]

Authors

Jean Marie Darmanin

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Ivan Grech

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Joseph Micallef

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Edward Gatt

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Owen Casha

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Ansel Briffa

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