Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass

Jean Marie Darmanin, Ivan Grech, Joseph Micallef, Edward Gatt, Owen Casha, Ansel Briffa. Design consideration for three-axis MEMS accelerometers using an asymmetric proof mass. In Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013. pages 2100-2105, IEEE, 2013. [doi]

Abstract

Abstract is missing.