On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer

Aditya N. Das, Jeongsik Sin, Dan O. Popa, Harry E. Stephanou. On the precision alignment and hybrid assembly aspects in manufacturing of a microspectrometer. In 2008 IEEE International Conference on Automation Science and Engineering, IEEE CASE 2008, Washington, DC, USA, August 23-26, 2008. pages 959-966, IEEE, 2008. [doi]

Abstract

Abstract is missing.