Back-End-of-Line Compatible Transistors for Monolithic 3-D Integration

Suman Datta, Sourav Dutta, Benjamin Grisafe, Jeff Smith, Srivatsa Srinivasa, Huacheng Ye. Back-End-of-Line Compatible Transistors for Monolithic 3-D Integration. IEEE Micro, 39(6):8-15, 2019. [doi]

Abstract

Abstract is missing.