Influence of Geometric Properties of Capacitive Sensors on Slope Error and Nonlinearity of Displacement Measurements

Lars Daul, Tao Jin, Ingo Busch, Ludger Koenders. Influence of Geometric Properties of Capacitive Sensors on Slope Error and Nonlinearity of Displacement Measurements. Sensors, 21(13):4270, 2021. [doi]

Abstract

Abstract is missing.