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Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics

Shounak De, B. Satyanarayana, Ganesh Sanjeev, K. Ramakrishna, K. Mohan Rao, Manjunatha Pattabi. Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics. Microelectronics Reliability, 54(12):2740-2746, 2014. [doi]

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