Microassembly of 3-D MEMS structures utilizing a MEMS microgripper with a robotic manipulator

Nikolai Dechev, William L. Cleghorn, James K. Mills. Microassembly of 3-D MEMS structures utilizing a MEMS microgripper with a robotic manipulator. In Proceedings of the 2003 IEEE International Conference on Robotics and Automation, ICRA 2003, September 14-19, 2003, Taipei, Taiwan. pages 3193-3199, IEEE, 2003.

Abstract

Abstract is missing.