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Development of a 6 Degree of Freedom Robotic Micromanipulator for Use in 3D MEMS Microassembly

Nikolai Dechev, Lu Ren, William Liu, William L. Cleghorn, James K. Mills. Development of a 6 Degree of Freedom Robotic Micromanipulator for Use in 3D MEMS Microassembly. In Proceedings of the 2006 IEEE International Conference on Robotics and Automation, ICRA 2006, May 15-19, 2006, Orlando, Florida, USA. pages 281-288, IEEE, 2006.

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Nikolai Dechev

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Lu Ren

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William Liu

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William L. Cleghorn

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James K. Mills

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