Patrick C. Deenen, Rick A. M. Adriaensen, John W. Fowler. Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control. In Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022. pages 3394-3405, IEEE, 2022. [doi]
@inproceedings{DeenenAF22,
title = {Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control},
author = {Patrick C. Deenen and Rick A. M. Adriaensen and John W. Fowler},
year = {2022},
doi = {10.1109/WSC57314.2022.10015307},
url = {https://doi.org/10.1109/WSC57314.2022.10015307},
researchr = {https://researchr.org/publication/DeenenAF22},
cites = {0},
citedby = {0},
pages = {3394-3405},
booktitle = {Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022},
publisher = {IEEE},
isbn = {978-1-6654-7661-4},
}