Patrick C. Deenen, Rick A. M. Adriaensen, John W. Fowler. Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control. In Winter Simulation Conference, WSC 2022, Singapore, December 11-14, 2022. pages 3394-3405, IEEE, 2022. [doi]
Abstract is missing.