Alfons Dehe, Martin Wurzer, Marc Fuldner, Ulrich Krumbein. Design of a poly silicon MEMS microphone for high signal-to-noise ratio. In Proceedings of the European Solid-State Device Research Conference, ESSDERC 2013, Bucharest, Romania, September 16-20, 2013. pages 292-295, IEEE, 2013. [doi]
Abstract is missing.