Test structures for dielectric spectroscopy of thin films at microwave frequencies

Nicola Delmonte, B. E. Watts, G. Chiorboli, P. Cova, Roberto Menozzi. Test structures for dielectric spectroscopy of thin films at microwave frequencies. Microelectronics Reliability, 47(4-5):682-685, 2007. [doi]

Abstract

Abstract is missing.