In-Situ Temperature Measurement on CMOS Integrated Micro-Hotplates for Gas Sensing Devices

Marco Deluca, Robert Wimmer-Teubenbacher, Lisa Mitterhuber, Johanna Mader, Karl Rohracher, Marco Holzer, Anton Köck. In-Situ Temperature Measurement on CMOS Integrated Micro-Hotplates for Gas Sensing Devices. Sensors, 19(3):672, 2019. [doi]

Abstract

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