A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors

Mingxing Deng, Quanyong Zhang, Kun Zhang, Hui Li 0063, Yikai Zhang, Wan Cao. A Novel Defect Inspection System Using Convolutional Neural Network for MEMS Pressure Sensors. J. Imaging, 8(10):268, 2022. [doi]

Abstract

Abstract is missing.