Fabrication and Characterization of a CMOS-MEMS Humidity Sensor

John Ojur Dennis, Abdelaziz Yousif Ahmed, Mohd Haris M. Khir. Fabrication and Characterization of a CMOS-MEMS Humidity Sensor. Sensors, 15(7):16674-16687, 2015. [doi]

Abstract

Abstract is missing.