A literature review on variability in semiconductor manufacturing: The next forward leap to Industry 4.0

Kean Dequeant, Philippe Vialletelle, Pierre Lemaire, Marie Laure Espinouse. A literature review on variability in semiconductor manufacturing: The next forward leap to Industry 4.0. In Winter Simulation Conference, WSC 2016, Washington, DC, USA, December 11-14, 2016. pages 2598-2609, IEEE, 2016. [doi]

Abstract

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