Siva Prasad Devireddy, Bigang Min, Zeynep Çelik-Butler, Hsing-Huang Tseng, Philip J. Tobin, Ania Zlotnicka. Improved low frequency noise characteristics of sub-micron MOSFETs with TaSiN/TiN gate on ALD HfO::2:: dielectric. Microelectronics Reliability, 47(8):1228-1232, 2007. [doi]
Abstract is missing.