Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy

Raden Dewanto, Tao Chen, Rebecca Cheung, Zhongxu Hu, Barry Gallacher, John Hedley. Reliability prediction of 3C-SiC cantilever beams using dynamic Raman spectroscopy. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 270-273, IEEE, 2012. [doi]

Abstract

Abstract is missing.