J. F. Dick, A. Elsayed, D. Schwarz, Jörg Schulze. Electrical Characterization of Low-Temperature Boron on Silicon Deposition utilizing Molecular Beam Epitaxy. In Marko Koricic, Zeljko Butkovic, Karolj Skala, Zeljka Car, Marina Cicin-Sain, Snjezana Babic, Vlado Sruk, Dejan Skvorc, Slobodan Ribaric, Stjepan Gros, Boris Vrdoljak, Mladen Mauher, Edvard Tijan, Predrag Pale, Darko Huljenic, Tihana Galinac Grbac, Matej Janjic, editors, 42nd International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2019, Opatija, Croatia, May 20-24, 2019. pages 19-23, IEEE, 2019. [doi]
Abstract is missing.