Resonant frequency tunable silicon fishbone-shaped MEMS double ended tuning fork

Hong Ding, Lifeng Fu, Yixiang Wang, Jin Xie 0002. Resonant frequency tunable silicon fishbone-shaped MEMS double ended tuning fork. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 233-236, IEEE, 2016. [doi]

Authors

Hong Ding

This author has not been identified. Look up 'Hong Ding' in Google

Lifeng Fu

This author has not been identified. Look up 'Lifeng Fu' in Google

Yixiang Wang

This author has not been identified. Look up 'Yixiang Wang' in Google

Jin Xie 0002

This author has not been identified. Look up 'Jin Xie 0002' in Google