Hong Ding, Lifeng Fu, Yixiang Wang, Jin Xie 0002. Resonant frequency tunable silicon fishbone-shaped MEMS double ended tuning fork. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 233-236, IEEE, 2016. [doi]
Abstract is missing.