High Performance Lithography Hotspot Detection With Successively Refined Pattern Identifications and Machine Learning

Duo Ding, J. Andres Torres, David Z. Pan. High Performance Lithography Hotspot Detection With Successively Refined Pattern Identifications and Machine Learning. IEEE Trans. on CAD of Integrated Circuits and Systems, 30(11):1621-1634, 2011. [doi]

Authors

Duo Ding

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J. Andres Torres

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David Z. Pan

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