Duo Ding, Andres J. Torres, Fedor G. Pikus, David Z. Pan. High performance lithographic hotspot detection using hierarchically refined machine learning. In Proceedings of the 16th Asia South Pacific Design Automation Conference, ASP-DAC 2011, Yokohama, Japan, January 25-27, 2011. pages 775-780, IEEE, 2011. [doi]
Abstract is missing.