Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty

Shengwei Ding, Jingang Yi, Mike Tao Zhang, Raha Akhavan-Tabatabaei. Performance Evaluation and Schedule Optimization of Multi-Cluster Tools with Process Times Uncertainty. In 2006 IEEE International Conference on Automation Science and Engineering, Shanghai, China, 7-10 October 2006. pages 112-117, IEEE, 2006. [doi]

Abstract

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