An effective on-line surface particles inspection instrument for large aperture optical element

Wendong Ding, Zhengtao Zhang, Da-peng Zhang, De Xu, Hai-Bing Lv, Xin-Xiang Miao, Guorui Zhou, Hao Liu. An effective on-line surface particles inspection instrument for large aperture optical element. Int. J. Autom. Comput., 14(4):420-431, 2017. [doi]

Abstract

Abstract is missing.