Nic Dirkx, Noud Mooren, Tom Oomen. Suppressing non-collocated disturbances in inferential motion control: with application to a wafer stage. In 2021 American Control Conference, ACC 2021, New Orleans, LA, USA, May 25-28, 2021. pages 4333-4338, IEEE, 2021. [doi]
@inproceedings{DirkxMO21,
title = {Suppressing non-collocated disturbances in inferential motion control: with application to a wafer stage},
author = {Nic Dirkx and Noud Mooren and Tom Oomen},
year = {2021},
doi = {10.23919/ACC50511.2021.9482883},
url = {https://doi.org/10.23919/ACC50511.2021.9482883},
researchr = {https://researchr.org/publication/DirkxMO21},
cites = {0},
citedby = {0},
pages = {4333-4338},
booktitle = {2021 American Control Conference, ACC 2021, New Orleans, LA, USA, May 25-28, 2021},
publisher = {IEEE},
isbn = {978-1-6654-4197-1},
}