Measurement and Analysis of Parasitic Capacitance in FinFETs with High-k Dielectrics and Metal-Gate Stack

Abhisek Dixit, Anirban Bandhyopadhyay, Nadine Collaert, Kristin De Meyer, Malgorzata Jurczak. Measurement and Analysis of Parasitic Capacitance in FinFETs with High-k Dielectrics and Metal-Gate Stack. In VLSI Design 2009: Improving Productivity through Higher Abstraction, The 22nd International Conference on VLSI Design, New Delhi, India, 5-9 January 2009. pages 253-258, IEEE, 2009. [doi]

@inproceedings{DixitBCMJ09,
  title = {Measurement and Analysis of Parasitic Capacitance in FinFETs with High-k Dielectrics and Metal-Gate Stack},
  author = {Abhisek Dixit and Anirban Bandhyopadhyay and Nadine Collaert and Kristin De Meyer and Malgorzata Jurczak},
  year = {2009},
  doi = {10.1109/VLSI.Design.2009.80},
  url = {http://dx.doi.org/10.1109/VLSI.Design.2009.80},
  tags = {analysis},
  researchr = {https://researchr.org/publication/DixitBCMJ09},
  cites = {0},
  citedby = {0},
  pages = {253-258},
  booktitle = {VLSI Design 2009: Improving Productivity through Higher Abstraction, The 22nd International Conference on VLSI Design, New Delhi, India, 5-9 January 2009},
  publisher = {IEEE},
  isbn = {978-0-7695-3506-7},
}