3D Geometric Simulation of MEMS Fabrication Processes: A Semantic Approach

Hrishikesh Dixit, Srikanth Kannapan, Dean L. Taylor. 3D Geometric Simulation of MEMS Fabrication Processes: A Semantic Approach. In Symposium on Solid Modeling and Applications. pages 376-387, 1997. [doi]

Abstract

Abstract is missing.