Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

Nam-Thai Doan, Jun-Hee Moon, Tai-Wook Kim, Heui-Jae Pahk. Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels. J. Electronic Imaging, 21(3):33028, 2012. [doi]

Authors

Nam-Thai Doan

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Jun-Hee Moon

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Tai-Wook Kim

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Heui-Jae Pahk

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