Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels

Nam-Thai Doan, Jun-Hee Moon, Tai-Wook Kim, Heui-Jae Pahk. Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels. J. Electronic Imaging, 21(3):33028, 2012. [doi]

@article{DoanMKP12,
  title = {Novel, fast, edge-directed image reconstruction algorithm using a substepping system for critical-dimension measurement of glass panels},
  author = {Nam-Thai Doan and Jun-Hee Moon and Tai-Wook Kim and Heui-Jae Pahk},
  year = {2012},
  doi = {10.1117/1.JEI.21.3.033028},
  url = {http://dx.doi.org/10.1117/1.JEI.21.3.033028},
  researchr = {https://researchr.org/publication/DoanMKP12},
  cites = {0},
  citedby = {0},
  journal = {J. Electronic Imaging},
  volume = {21},
  number = {3},
  pages = {33028},
}