Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Han Du, Fook Siong Chau, Guangya Zhou. Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators. Micromachines, 7(4):69, 2016. [doi]

Abstract

Abstract is missing.