Yijia Du, Ting-Ting Yang, Dong-Dong Gong, Yi-Cheng Wang, Xiang-Yu Sun, Feng Qin, Gang Dai. High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors. Sensors, 18(7):2055, 2018. [doi]
Abstract is missing.