Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool

Hao Duan, Shinya Morita, Takuya Hosobata, Masahiro Takeda 0005, Yutaka Yamagata. Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool. IJAT, 15(2):225-233, 2021. [doi]

Abstract

Abstract is missing.