Backside interferometric methods for localization of ESD-induced leakage current and metal shorts - researchr publication authors

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V. Dubec, Scrgey Bychikhin, Dionyz Pogany, Erich Gornik, Tilo Brodbeck, Wolfgang Stadler. Backside interferometric methods for localization of ESD-induced leakage current and metal shorts. Microelectronics Reliability, 47(9-11):1539-1544, 2007. [doi]

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