Online Testing of MEMS Based on Encoded Stimulus Superposition

Norbert Dumas, Zhou Xu, Kostas Georgopoulos, R. John T. Bunyan, Andrew Richardson. Online Testing of MEMS Based on Encoded Stimulus Superposition. J. Electronic Testing, 24(6):555-566, 2008. [doi]

Authors

Norbert Dumas

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Zhou Xu

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Kostas Georgopoulos

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R. John T. Bunyan

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Andrew Richardson

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