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Development of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot

Minh Duc Duong, Kazuhiko Terashima, Toshio Kamigaki, Hirotoshi Kawamura. Development of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot. IJAT, 2(6):479-485, 2008. [doi]

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