Reliability aspects of Hf-based capacitors: Breakdown and trapping effects

Rainer Duschl, M. Kerber, A. Avellan, S. Jakschik, U. Schroeder, S. Kudelka. Reliability aspects of Hf-based capacitors: Breakdown and trapping effects. Microelectronics Reliability, 47(4-5):497-500, 2007. [doi]

Abstract

Abstract is missing.