Effect of chamber pressure on red emission from silicon thin films deposited by means of hot-wire CVD

Ateet Dutt, Yasuhiro Matsumoto, Mauricio Ortega-López, V. Sanchez, María de la Luz Olvera. Effect of chamber pressure on red emission from silicon thin films deposited by means of hot-wire CVD. In 12th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2015, Mexico City, Mexico, October 28-30, 2015. pages 1-6, IEEE, 2015. [doi]

Abstract

Abstract is missing.