On the Complexity of Wafer-to-Wafer Integration

Guillerme Duvillié, Marin Bougeret, Vincent Boudet, Trivikram Dokka, Rodolphe Giroudeau. On the Complexity of Wafer-to-Wafer Integration. In Vangelis Th. Paschos, Peter Widmayer, editors, Algorithms and Complexity - 9th International Conference, CIAC 2015, Paris, France, May 20-22, 2015. Proceedings. Volume 9079 of Lecture Notes in Computer Science, pages 208-220, Springer, 2015. [doi]

Abstract

Abstract is missing.