Gate oxide failures due to anomalous stress from HBM ESD testers

Charvaka Duvvury, Robert Steinhoff, Gianluca Boselli, Vijay Reddy, Hans Kunz, Steve Marum, Roger Cline. Gate oxide failures due to anomalous stress from HBM ESD testers. Microelectronics Reliability, 46(5-6):656-665, 2006. [doi]

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