David S. Eddy, Douglas R. Sparks. Application of MEMS technology in automotive sensors and actuators. Proceedings of the IEEE, 86(8):1747-1755, 1998. [doi]
@article{EddyS98,
title = {Application of MEMS technology in automotive sensors and actuators},
author = {David S. Eddy and Douglas R. Sparks},
year = {1998},
doi = {10.1109/5.704280},
url = {https://doi.org/10.1109/5.704280},
researchr = {https://researchr.org/publication/EddyS98},
cites = {0},
citedby = {0},
journal = {Proceedings of the IEEE},
volume = {86},
number = {8},
pages = {1747-1755},
}