A discussion of object-oriented process modeling approaches for discrete manufacturing on the example of the semiconductor industry

Hans Ehm, Stefan Heilmayer, Thomas Ponsignon, Tim Russland. A discussion of object-oriented process modeling approaches for discrete manufacturing on the example of the semiconductor industry. In Proceedings of the 2010 Winter Simulation Conference, WSC 2010, Baltimore, Maryland, USA, 5-8 December 2010. pages 2553-2562, WSC, 2010. [doi]

Abstract

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