A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

Savannah R. Eisner, Cailin A. Chapin, Ruochen Lu, Yansong Yang, Songbin Gong, Debbie G. Senesky. A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air. Sensors, 21(1):149, 2021. [doi]

Abstract

Abstract is missing.