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Savannah R. Eisner, Cailin A. Chapin, Ruochen Lu, Yansong Yang, Songbin Gong, Debbie G. Senesky. A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air. Sensors, 21(1):149, 2021. [doi]
Abstract is missing.